在线销售1号
Recent years, Dalian Special Gases Co., Ltd has increased its investment in electronic gas continuously, and became a member of ICMTIA "The Integrated Circuit Material Industry Technology Innovation Strategic Alliance" in 2018. With rich manufacturing experience, advanced analysis ability (CNAS certified laboratory) and rigorous management system, it continues to develop gas products to meet customers’ needs, forming product lines with mixed gas as the main, special chemical gas and high purity gas as supplement, related gas products have been applied in LED, IC, photovoltaic and other industries.
Component | Concentration | Valve type | Filling pressure |
PH3/H2 | ppm ~ % | DISS632/CGA350 | 10MPa |
PH3/N2 | ppm ~ % | DISS632/CGA350 | 10MPa |
PH3/He | ppm ~ % | DISS632/CGA350 | 10MPa |
SiH4/H2 | ppm ~ % | DISS632/CGA350 | 10MPa |
SiH4/N2 | ppm ~ % | DISS632/CGA350 | 10MPa |
B2H6/H2 | ppm | DISS632/CGA350 | 10MPa |
30%O2/He | DISS714 | 12MPa | |
20%O2/Ar | DISS714 | 10MPa | |
3%H2/Ar | DISS724 | 10MPa | |
15%O2/Ar | DISS714 | 10MPa | |
0.5%O2/He | DISS714 | 12MPa | |
1.2%He/N2 | DISS714 | 12MPa | |
F2/Kr/Ne | % | CGA679/DISS728 | 13.8MPa |
F2/Ar/Ne | % | CGA679/DISS728 | 13.8MPa |
Kr/Ne | % | CGA580/DISS718 | 13.8MPa |
Ar/Xe/Ne | % | CGA580/DISS718 | 13.8MPa |
4%H2/N2 | DISS718 | 12MPa | |
2.7%C2H4/He | JISS22-14OR | 12MPa | |
99.9% NO | JISS22-14-OR | 3.5MPa |
